The decrease of insertion speed from 2.0 mm/s to 0.5 mm/s reduces [Formula see text] by 76.2% ~85.1% and [Formula see text] by 11.6% ~14.7%, respectively. Compared with laser machining, CNC micro milling and DRIE ensure dimensional accuracy of the PEG/DEX coating, reducing [Formula see text] by 20.2% ~51.4% and [Formula see text] by 8.0% ~11.6%,…[Read more]